Determination of the elastic modulus of thin film materials using self-deformed micromachined cantilevers
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. Silicon as a mechanical material
2. Mechanical properties of thin films
3. A new technique for measuring the mechanical properties of thin films
4. Stress-related effects in thin films
5. Young’s modulus measurements of thin films using micromechanics
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