Determination of mechanical properties of PECVD silicon nitride thin films for tunable MEMS Fabry–Pérot optical filters-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Determination of mechanical properties of PECVD silicon nitride thin films for tunable MEMS Fabry–Pérot optical filters

Published:2005-01-14 Issue:3 Volume:15 Page:608-614
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Huang H,Winchester K,Liu Y,Hu X Z,Musca C A,Dell J M,Faraone L

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Tunable Fabry-Pérot cavities fabricated from PECVD silicon nitride employing zinc sulphide as the sacrificial layer

2. Mechanism of SiN x H y Deposition from NH 3 ‐ SiH4 Plasma

3. Microbridge testing of silicon oxide/silicon nitride bilayer films deposited on silicon wafers

4. Analysis of elastic and plastic deformation associated with indentation testing of thin films on substrates

5. Elastic contact versus indentation modeling of multi-layered materials

Cited by 68 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Self-Rolled-Up Aluminum Nitride-Based 3D Architectures Enabled by Record-High Differential Stress;ACS APPL MATER INTER;2022

2. Self-Rolled-Up Aluminum Nitride-Based 3D Architectures Enabled by Record-High Differential Stress;ACS Applied Materials & Interfaces;2022-06-14

3. Mechanical investigations of free-standing SiN membranes patterned with one-dimensional photonic crystal structures;Journal of Applied Physics;2022-05-21

4. Nitrogen rich PECVD silicon nitride for passivation of Si and AlGaN/GaN HEMT devices;Solid-State Electronics;2021-12

5. Heat Treatment-Induced Microstructure and Property Evolution of Mg/Al Intermetallic Compound Coatings Prepared by Al Electrodeposition on Mg Alloy from Molten Salt Electrolytes;Materials;2021-03-14

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3