Size-dependent pull-in instability of electrostatically actuated microbeam-based MEMS-Reference-Cited by-同舟云学术

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Size-dependent pull-in instability of electrostatically actuated microbeam-based MEMS

Published:2011-01-11 Issue:2 Volume:21 Page:027001
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Wang Binglei,Zhou Shenjie,Zhao Junfeng,Chen Xi

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference37 articles.

1. Nanotube Nanotweezers

2. Experiments and modeling of carbon nanotube-based NEMS devices

3. Characterization of contact electromechanics through capacitance-voltage measurements and simulations

4. Micromachined low-loss microwave switches

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