Fabrication of low loss MOMS resonators for quantum optics experiments-Reference-Cited by-同舟云学术

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Fabrication of low loss MOMS resonators for quantum optics experiments

Published:2013-06-24 Issue:8 Volume:23 Page:085010
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Serra E,Bagolini A,Borrielli A,Boscardin M,Cataliotti F S,Marin F,Marino F,Pontin A,Prodi G A,Vannoni M,Bonaldi M

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/23/i=8/a=085010/pdf

Reference49 articles.

1. Cavity Optomechanics: Back-Action at the Mesoscale

2. Optomechanics

3. Optomechanics of deformable optical cavities

4. High quality mechanical and optical properties of commercial silicon nitride membranes

5. Ultralow-dissipation optomechanical resonators on a chip

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Dynamical Two-Mode Squeezing of Thermal Fluctuations in a Cavity Optomechanical System;Physical Review Letters;2016-03-08

2. Fabrication and characterization of low loss MOMS resonators for cavity opto-mechanics;Microelectronic Engineering;2015-09

3. Low-Loss Optomechanical Oscillator for Quantum-Optics Experiments;Physical Review Applied;2015-05-22

4. Low loss optomechanical cavities based on silicon oscillator;SPIE Proceedings;2015-05-21

5. Low loss single-crystal silicon mechanical resonators for the investigation of thermal noise statistical properties;Sensors and Actuators A: Physical;2015-05

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