A robust MEMS probe card with vertical guide for a fine pitch test-Reference-Cited by-同舟云学术

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A robust MEMS probe card with vertical guide for a fine pitch test

Published:2007-06-11 Issue:7 Volume:17 Page:1350-1359
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Kim Bong-Hwan,Kim Hyeon-Cheol,Choi Soon-Don,Chun Kukjin,Kim Jong-Bok,Kim Jong-Hyun

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference37 articles.

1. A micromachined array probe card-characterization

2. Thermally actuated microprobes for a new wafer probe card

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