A novel micromechanical flow controller-Reference-Cited by-同舟云学术

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A novel micromechanical flow controller

Published:1997-09-01 Issue:3 Volume:7 Page:165-169
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Toor M W van,Lammerink T S J,Gardeniers J G E,Elwenspoek M,Monsma D

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference7 articles.

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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