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Characterization of deep wet etching of fused silica glass for single cell and optical sensor deposition

  • Published:2009-05-20 Issue:6 Volume:19 Page:065013
  • ISSN:0960-1317
  • Container-title:Journal of Micromechanics and Microengineering
  • language:
  • Short-container-title:J. Micromech. Microeng.

Author:

Zhu Haixin,Holl Mark,Ray Tathagata,Bhushan Shivani,Meldrum Deirdre R

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

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