Sub-micron metallic electrothermal actuators-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Sub-micron metallic electrothermal actuators

Published:2004-11-25 Issue:2 Volume:15 Page:322-327
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Lee Jeong-Soo,Park Daniel Sang-Won,Nallani Arun Kumar,Lee Gil-Sik,Lee Jeong-Bong

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Characterization of SU-8 as a photoresist for electron-beam lithography

2. In-plane tip deflection and force achieved with asymmetrical polysilicon electrothermal microactuators

3. Large-force electrothermal linear micromotors

4. PCB-integrated metallic thermal micro-actuators

5. Electrothermal properties and modeling of polysilicon microthermal actuators

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A novel approach on design of a fractal inspired logarithmic spiral antenna-based absorber for polarization and incident angle insensitive broadband electromagnetic energy harvesting;Journal of Applied Physics;2023-03-01

2. Design of an ultra-wideband omnidirectional and polarization insensitive flower petal antenna for potential ambient electromagnetic energy harvesting applications;Scientific Reports;2022-04-12

3. Design, modeling and experimental validation of a micro cantilever beam with an electro-controllable twisting ability;Journal of Micromechanics and Microengineering;2021-05-13

4. Numerical Investigation of a MEMS Thermal Actuator Performance by Modifying its Geometric Dimensions;Procedia Manufacturing;2019

5. Design, closed-form modeling and analysis of SU-8 based electrothermal microgripper for biomedical applications;Microsystem Technologies;2018-07-23

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3