Non-photolithographic pattern transfer for fabricating pen-shaped microneedle structures-Reference-Cited by-同舟云学术

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Non-photolithographic pattern transfer for fabricating pen-shaped microneedle structures

Published:2004-08-11 Issue:11 Volume:14 Page:1462-1467
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Shikida Mitsuhiro,Ando Masaki,Ishihara Yuji,Ando Taeko,Sato Kazuo,Asaumi Kazuo

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array

2. An ion milling pattern transfer technique for fabrication of three-dimensional micromechanical structures

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