Micromachined end-effector and techniques for directed MEMS assembly

Author:

Tsui Kenneth,Geisberger Aaron A,Ellis Matt,Skidmore George D

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Cited by 75 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. MEMS Electrothermal Actuators for Underwater Manipulation and Mechanical Characterisation of Human Red Blood Cells;2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP);2023-05-28

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3. Design and Development of a Novel 3-DOF Parallel Robotic Polishing End-effector;2021 6th IEEE International Conference on Advanced Robotics and Mechatronics (ICARM);2021-07-03

4. Controlled rotation of micro-objects using acoustically driven microbubbles;Applied Physics Letters;2021-02-08

5. A novel compliant piezoelectric actuated symmetric microgripper for the parasitic motion compensation;Mechanism and Machine Theory;2021-01

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