Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors-Reference-Cited by-同舟云学术

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Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors

Published:2008-02-20 Issue:3 Volume:18 Page:035040
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Kühne S,Graf M,Tricoli A,Mayer F,Pratsinis S E,Hierlemann A

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference28 articles.

1. Micromachined metal oxide gas sensors: opportunities to improve sensor performance

2. Microhotplate platforms for chemical sensor research

3. CMOS-based chemical microsensors

4. Metal Oxide-Based Monolithic Complementary Metal Oxide Semiconductor Gas Sensor Microsystem

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