Femtosecond laser micromachining of dielectric materials for biomedical applications-Reference-Cited by-同舟云学术

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Femtosecond laser micromachining of dielectric materials for biomedical applications

Published:2008-01-28 Issue:3 Volume:18 Page:035020
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Farson Dave F,Choi Hae Woon,Zimmerman Burr,Steach Jeremy K,Chalmers Jeffery J,Olesik Susan V,Lee L James

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference39 articles.

1. Ultrafast laser micromachining and patterning of thermal spray multilayers for thermopile fabrication

2. Fabrication of microfluidic systems in poly(dimethylsiloxane)

3. Femtosecond laser ablation for microfluidics

4. Smooth surface glass etching by deep reactive ion etching with SF[sub 6] and Xe gases

5. Focused ion beam microfabrication in Foturan™ photosensitive glass

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