Author:
Lee Dae Hoon,Park Dae Eun,Yoon Joon Bo,Kwon Sejin,Yoon Euisik
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Cited by
35 articles.
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2. Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine;2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS);2020-05
3. MEMS lithography;Handbook of Silicon Based MEMS Materials and Technologies;2020
4. An experimental study of an ultra-micro scale gas “Turbine”;Applied Thermal Engineering;2019-12
5. MEMS Lithography;Handbook of Silicon Based MEMS Materials and Technologies;2015