Design and operation of a silicon ring resonator for force sensing applications above 1 MHz-Reference-Cited by-同舟云学术

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Design and operation of a silicon ring resonator for force sensing applications above 1 MHz

Published:2009-10-05 Issue:11 Volume:19 Page:115009
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Walter B,Faucher M,Algré E,Legrand B,Boisgard R,Aimé J-P,Buchaillot L

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. Atomic Force Microscope

2. Microfabrication of cantilever styli for the atomic force microscope

3. Short cantilevers for atomic force microscopy

4. Small cantilevers for force spectroscopy of single molecules

5. Towards atomic force microscopy up to 100 MHz

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1. Analytical solutions for thermo-elastic damping of rotational ring resonators incorporating thermal relaxations and elastic small scales;Journal of Thermal Stresses;2024-01-09

2. Couple stress-based thermoelastic damping in microrings with rectangular cross section according to Moore–Gibson–Thompson heat equation;Archives of Civil and Mechanical Engineering;2023-05-25

3. Analytical Model for Thermoelastic Dissipation in Oscillations of Toroidal Micro/Nanorings in the Context of Guyer–Krumhansl Heat Equation;International Journal of Structural Stability and Dynamics;2023-03-06

4. Analytical Model for Thermoelastic Damping in In-Plane Vibrations of Circular Cross-Sectional Micro/Nanorings with Dual-Phase-Lag Heat Conduction;Journal of Vibration Engineering & Technologies;2023-02-03

5. Dual-phase-lagging thermoelastic damping and frequency shift of micro/nano-ring resonators with rectangular cross-section;Thin-Walled Structures;2021-02

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