Flexible and biocompatible microelectrode arrays fabricated by supersonic cluster beam deposition on SU-8-Reference-Cited by-同舟云学术

Flexible and biocompatible microelectrode arrays fabricated by supersonic cluster beam deposition on SU-8

Published:2011-03-10 Issue:4 Volume:21 Page:045013
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Marelli Mattia,Divitini Giorgio,Collini Cristian,Ravagnan Luca,Corbelli Gabriele,Ghisleri Cristian,Gianfelice Antonella,Lenardi Cristina,Milani Paolo,Lorenzelli Leandro

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference32 articles.

1. SU-8 as a structural material for labs-on-chips and microelectromechanical systems

2. A high aspect ratio SU-8 fabrication technique for hollow microneedles for transdermal drug delivery and blood extraction

3. Fabrication of miniaturized fluidic devices using SU-8 based lithography and low temperature wafer bonding

4. Biocompatible SU-8-Based Microprobes for Recording Neural Spike Signals From Regenerated Peripheral Nerve Fibers

5. SU-8-based microneedles forin vitroneural applications

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