Thermal-wave balancing flow sensor with low-drift power feedback-Reference-Cited by-同舟云学术

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Thermal-wave balancing flow sensor with low-drift power feedback

Published:2014-04-11 Issue:5 Volume:24 Page:055016
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Dijkstra M,Lammerink T S J,Pjetri O,de Boer M J,Berenschot J W,Wiegerink R J,Elwenspoek M C

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/24/i=5/a=055016/pdf

Reference21 articles.

1. MEMS flow sensors for nano-fluidic applications

2. Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels

3. Low-drift flow sensor with zero-offset thermopile-based power feedback

4. Time-of-flight thermal flowrate sensor for lab-on-chip applications

5. Micromachined Flow Sensors Enabling Electrocalorimetric and TOF Transduction

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor With Temperature Compensation;Journal of Microelectromechanical Systems;2019-10

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