Analytical and electrical modeling of a MEMS thermoelectric microwave power sensor
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0960-1317/26/i=9/a=094001/pdf
Reference21 articles.
1. CAD challenges for microsensors, microactuators, and microsystems
2. Development of MEMS component library with Modelica
3. New structure for DC-65 GHz thermal power sensor
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A Novel 3-D Equivalent Circuit Model of Thermoelectric MEMS Microwave Power Sensors;IEEE Transactions on Electron Devices;2021-06
2. MEMS microwave power sensor with thermovoltage compensation and transformation;Electronics Letters;2018-08
3. A Microwave Power Sensor;Micro/Nano Technologies;2018
4. A Microwave Power Sensor;Toxinology;2017-09-26
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