Design and process considerations for a tunneling tip accelerometer-Reference-Cited by-同舟云学术

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Design and process considerations for a tunneling tip accelerometer

Published:1996-09-01 Issue:3 Volume:6 Page:352-358
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Zavracky Paul M,McClelland Bob,Warner Keith,Wang Jianchao,Hartley Frank,Dolgin Ben

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. A highly symmetrical capacitive micro-accelerometer with single degree-of-freedom response

2. An electron tunneling sensor

3. The scanning tunneling microscope as a high‐gain, low‐noise displacement sensor

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning;Sensors;2021-05-30

2. Hermetic Packaging for Resonant MEMS;Advanced Micro and Nanosystems;2015-08-21

3. A cost-effective three axis CMOS accelerometer combining micromachining and digital technology;Analog Integrated Circuits and Signal Processing;2014-03-14

4. A Novel RFID-Based Thermal Convection Accelerometer with Heater and Thermal Piles Deposited by E-Gun Focused on Mixing Powders of Metals;Applied Mechanics and Materials;2013-08

5. A More Reliable and Easy Manufacturing Wireless Thermal Convection Angular Accelerometer without any Movable Parts and Grooved Cavity;Applied Mathematics & Information Sciences;2013-02-01

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