Accounting for PDMS shrinkage when replicating structures-Reference-Cited by-同舟云学术

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Accounting for PDMS shrinkage when replicating structures

Published:2014-10-29 Issue:12 Volume:24 Page:127002
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Madsen Morten Hannibal,Feidenhans’l Nikolaj A,Hansen Poul-Erik,Garnæs Jørgen,Dirscherl Kai

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/24/i=12/a=127002/pdf

Reference23 articles.

1. New Approaches to Nanofabrication: Molding, Printing, and Other Techniques

2. Subnanometer Replica Molding of Molecular Steps on Ionic Crystals

3. Solvent Compatibility of Poly(dimethylsiloxane)-Based Microfluidic Devices

4. Incubation and ablation behavior of poly(dimethylsiloxane) for 266 nm irradiation

5. Replication of micro and nano surface geometries

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