Low-thermal-budget and selective relaxation of stress gradients in gold micro-cantilever beams using ion implantation-Reference-Cited by-同舟云学术

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Low-thermal-budget and selective relaxation of stress gradients in gold micro-cantilever beams using ion implantation

Published:2005-11-21 Issue:12 Volume:15 Page:2469-2478
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Kang T J,Kim J G,Lee J S,Lee J H,Hahn J H,Lee H Y,Kim Y H

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Variations in Young's modulus and intrinsic stress of LPCVD-polysilicon due to high-temperature annealing

2. Impact of high-thermal budget anneals on polysilicon as a micromechanical material

3. Properties of polysilicon films annealed by a rapid thermal annealing process

4. Residual-stress relaxation in polysilicon thin films by high-temperature rapid thermal annealing

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1. Dimensional-Nanopatterned Piezoresistive Silicon Microcantilever for Environmental Sensing;Advanced MEMS/NEMS Fabrication and Sensors;2021-10-13

2. Micro-slotting technique for reliable measurement of sub-surface residual stress in Ti-6Al-4V;The Journal of Strain Analysis for Engineering Design;2018-06-03

3. A novel design for low insertion loss, multi-band RF-MEMS switch with low pull-in voltage;Engineering Science and Technology, an International Journal;2016-03

4. Room-temperature control of the residual stress gradient in titanium micro-cantilever beams by helium ion implantation;Sensors and Actuators A: Physical;2014-09

5. Submicron-scale depth profiling of residual stress in amorphous materials by incremental focused ion beam slotting;Acta Materialia;2012-03

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