Meandering $lquot$string-like$rquot$ features observed in an anodic bond-Reference-Cited by-同舟云学术

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Meandering $lquot$string-like$rquot$ features observed in an anodic bond

Published:2002-06-21 Issue:5 Volume:12 Page:541-547
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Spangler Glenn E,Kolesar Edward S

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference51 articles.

1. Field Assisted Glass‐Metal Sealing

2. Characterization of the electrostatic bonding of silicon and Pyrex glass

3. Direct-Current Polarization During Field-Assisted Glass-Metal Sealing

4. The electrical conduction of glass at high field strengths

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Anodic bonding;International Materials Reviews;2006-10

2. Wafer Bonding Techniques for MEMS;Sensor Letters;2005-12-01

3. Anodic oxidation during electrostatic bonding;Philosophical Magazine;2004-02-21

4. Characterization of Cation Depletion in Pyrex during Electrostatic Bonding;Journal of The Electrochemical Society;2003

5. Systemintegration;Praxiswissen Mikrosystemtechnik

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