Parametric study and optimization of a micro-optical switch with a laterally driven electromagnetic microactuator-Reference-Cited by-同舟云学术

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Parametric study and optimization of a micro-optical switch with a laterally driven electromagnetic microactuator

Published:2002-10-17 Issue:6 Volume:12 Page:939-947
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Han Jeong Sam,Ko Jong Soo,Kim Youn Tae,Kwak Byung Man

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Photonic-crystal ultrashort bends with improved transmission and low reflection at 1.55 μm

2. Micro-opto-mechanical 2×2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation

3. On a tunable bistable MEMS-theory and experiment

4. Bistable planar polysilicon microactuator with shallow arch-shaped leaf springs

5. Integrated circuit compatible electrostatic polysilicon microrelays

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5. Voltage-Induced Snap-Through of an Asymmetrically Laminated, Piezoelectric, Thin-Film Diaphragm Micro-Actuator—Part 1: Experimental Studies and Mathematical Modeling;Journal of Vibration and Acoustics;2018-04-17

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