An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry-Reference-Cited by-同舟云学术

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An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry

Published:2015-10-05 Issue:11 Volume:25 Page:115013
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Lullin Justine,Bargiel Sylwester,Lemoal Patrice,Perrin Stéphane,Albero Jorge,Passilly Nicolas,Froehly Luc,Lardet-Vieudrin Franck,Gorecki Christophe

Funder

Agence Nationale de la Recherche

European Commission

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/25/i=11/a=115013/pdf

Reference24 articles.

1. Optical coherence tomography for ultrahigh resolution in vivo imaging

2. Comparison of phase-shifting techniques for in vivo full-range, high-speed Fourier-domain optical coherence tomography

3. High-resolution 3D OCT imaging with a MEMS scanning endoscope

4. Vertical-actuated electrostatic comb drive with in situ capacitive position correction for application in phase shifting diffraction interferometry

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1. MEMS Scanning Mirrors for Optical Coherence Tomography;Photonics;2020-12-30

2. Fast ultra-deep silicon cavities: Toward isotropically etched spherical silicon molds using an ICP-DRIE;Journal of Vacuum Science & Technology B;2019-03

3. Micromachined phase-shifted array-type Mirau interferometer for swept-source OCT imaging: design, microfabrication and experimental validation;Biomedical Optics Express;2019-02-07

4. Swept-source optical coherence tomography microsystem with an integrated Mirau interferometer and electrothermal micro-scanner;Optics Letters;2018-10-01

5. The SS-OCT endomicroscopy probe based on MOEMS Mirau micro-interferometer for early stomach cancer detection;Optical Micro- and Nanometrology VII;2018-05-24

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