Patterning PDMS using a combination of wet and dry etching
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. Low-cost PDMS seal ring for single-side wet etching of MEMS structures
2. Characterization of Polydimethylsiloxane (PDMS) Properties for Biomedical Micro/Nanosystems
3. SOFT LITHOGRAPHY
4. A PDMS-based gas permeation pump for on-chip fluid handling in microfluidic devices
5. Electronic skin: architecture and components
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