Nozzle fabrication for micropropulsion of a microsatellite-Reference-Cited by-同舟云学术

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Nozzle fabrication for micropropulsion of a microsatellite

Published:2009-03-18 Issue:4 Volume:19 Page:045008
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Louwerse M C,Jansen H V,Groenendijk M N W,Elwenspoek M C

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. Black silicon method: X. A review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment

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