Design and analysis of a high pressure piezoelectric actuated microvalve
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference23 articles.
1. A review of microvalves
2. A micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator
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4. Electrostatically driven gas valve with high conductance
5. An electrostatically actuated polymer microvalve equipped with a movable membrane electrode
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