How slender can comb-drive fingers be?
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Laterally Driven Polysilicon Resonant Microstructures
2. Comb-drive actuators for large displacements
3. Analytical approach and numerical α-lines method for pull-in hyper-surface extraction of electrostatic actuators with multiple uncoupled voltage sources
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