Modelling squeeze film effects in a MEMS accelerometer with a levitated proof mass
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference21 articles.
1. Squeeze-film damping in solid-state accelerometers
2. A comparison of squeeze-film theory with measurements on a microstructure
3. Damping and gas viscosity measurements using a microstructure
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