Ultrasonic vibration-assisted femtosecond laser machining of microholes
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Quantification of thermal energy deposited in silicon by multiple femtosecond laser pulses
2. Effect of femtosecond laser irradiation on structure of UV grade fused silica
3. A study of balancing the competing effects of ultrashort laser induced plasma for optimal laser machining
4. Femtosecond laser machining characteristics of Nitinol
5. Laser Material Processing
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