Micro-fabricated membrane gas valves with a non-stiction coating deposited by C4F8/Ar plasma-Reference-Cited by-同舟云学术

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Micro-fabricated membrane gas valves with a non-stiction coating deposited by C4F8/Ar plasma

Published:2008-08-01 Issue:9 Volume:18 Page:095015
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Han Jeahyeong,Flachsbart Bruce,Masel Rich I,Shannon Mark A

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. MEMS-Micropumps: A Review

2. A review of microvalves

3. Fabrication and characterization of a micromachined passive valve

4. Design, fabrication and characterization of a novel gas microvalve using micro- and fine-machining

5. Micropump based on PZT unimorph and one-way parylene valves

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1. Thin films on silicon;Handbook of Silicon Based MEMS Materials and Technologies;2020

2. The stability and degradation of PECVD fluoropolymer nanofilms;Polymer Degradation and Stability;2019-02

3. Lab-on-a-Chip and Fluid Manipulation Applications;Nanofluidics and Microfluidics;2014

4. PDMS Selective Bonding for the Fabrication of Biocompatible All Polymer NC Microvalves;Journal of Microelectromechanical Systems;2013-12

5. Electrostatically driven micropump with peristaltically moving membrane;Micro & Nano Letters;2013-10

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