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Thermal and mechanical analysis of micromachined gas sensors

  • Published:2003-05-14 Issue:5 Volume:13 Page:548-556
  • ISSN:0960-1317
  • Container-title:Journal of Micromechanics and Microengineering
  • language:
  • Short-container-title:J. Micromech. Microeng.

Author:

Puigcorb J,Vogel D,Michel B,Vil A,Gr cia I,Can C,Morante J R

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

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