Dynamic analytical modelling and piezoelectric characterization of a Pb(Zr, Ti)O3/SiN cantilever with losses-Reference-Cited by-同舟云学术

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Dynamic analytical modelling and piezoelectric characterization of a Pb(Zr, Ti)O3/SiN cantilever with losses

Published:2010-10-15 Issue:11 Volume:20 Page:115019
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Arndt G,Defay E,Le Rhun G,Rey P,Perruchot F,Aid M,Liu L,Miller M

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. A fully wafer-level packaged RF MEMS switch with low actuation voltage using a piezoelectric actuator

2. Interferometric measurements of electric field‐induced displacements in piezoelectric thin films

3. Characterization of piezoelectric properties of zinc oxide thin films deposited on silicon for sensors applications

4. The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin films

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films;Journal of Micromechanics and Microengineering;2020-01-30

2. Multiplexed functionalization of nanoelectromechanical systems with photopatterned molecularly imprinted polymers;Journal of Micromechanics and Microengineering;2019-01-14

3. Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT);Journal of Micromechanics and Microengineering;2015-01-30

4. Measurement of Piezoelectric Strain Constant Based on Virtual Instrument Technology by Dynamic Method;Applied Mechanics and Materials;2013-07

5. Electrostriction for thin films: an alternative to piezoelectricity?;2011 IEEE International Ultrasonics Symposium;2011-10

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