Highly sensitive ZnO thin film bulk acoustic resonator for hydrogen detection-Reference-Cited by-同舟云学术

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Highly sensitive ZnO thin film bulk acoustic resonator for hydrogen detection

Published:2011-10-12 Issue:11 Volume:21 Page:115018
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Chen Da,Wang Jing-jing,Liu Qi-xin,Xu Yan,Li De-hua,Liu Yi-jian

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. Metal oxide hydrogen, oxygen, and carbon monoxide sensors for hydrogen setups and cells

2. A solid-state sensor platform for the detection of hydrogen cyanide gas

3. Design and performance of a microcantilever-based hydrogen sensor

4. Study on Pd functionalization of microcantilever for hydrogen detection promotion

5. Highly sensitive hydrogen gas sensors using single-walled carbon nanotubes grafted with Pd nanoparticles

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