A gyroscope fabrication method for high sensitivity and robustness to fabrication tolerances-Reference-Cited by-同舟云学术

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A gyroscope fabrication method for high sensitivity and robustness to fabrication tolerances

Published:2014-06-10 Issue:7 Volume:24 Page:075013
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Sung Jungwoo,Kim Jin Young,Seok Seyeong,Kwon Hyuckjin J,Kim Minseo,Kim Geonhwee,Lim Geunbae

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/24/i=7/a=075013/pdf

Reference22 articles.

1. Micromachined inertial sensors

2. Air-core photonic-bandgap fiber-optic gyroscope

3. Long-Term Stability of an Area-Reversible Atom-Interferometer Sagnac Gyroscope

4. Design, fabrication, and operation of submicron gap comb-drive microactuators

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1. A Ring-Shaped MEMS-Based Piezoresistive Force Sensor for Cardiac Ablation Catheters;IEEE Sensors Journal;2021-11-15

2. A Tuning Fork Gyroscope with a Polygon-Shaped Vibration Beam;Micromachines;2019-11-25

3. A Novel High-Sensitivity Butterfly Gyroscope Driven by Horizontal Driving Force;IEEE Sensors Journal;2019-03-15

4. Design, Analysis and Experimental Results of Micromachined Single-structure Triaxis Vibratory Gyroscope with Advanced Coupling Mechanism;Sensors and Materials;2018-12-10

5. System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation;Sensors;2017-11-18

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