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Dry etching of polydimethylsiloxane using microwave plasma

  • Published:2009-08-24 Issue:9 Volume:19 Page:095010
  • ISSN:0960-1317
  • Container-title:Journal of Micromechanics and Microengineering
  • language:
  • Short-container-title:J. Micromech. Microeng.

Author:

Hwang Sung Jin,Oh Dong Joon,Jung Phill Gu,Lee Sang Min,Go Jeung Sang,Kim Joon-Ho,Hwang Kyu-Youn,Ko Jong Soo

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

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