A thick film screen-printed ceramic capacitive pressure microsensor for high temperature applications
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. High Temperature Microsensors Based On Polycrystalline Diamond Thin Films
2. A high temperature pressure sensor with β-SiC piezoresistors on SOI substrates
3. Recent Progress Toward a Manufacturable Polycrystalline SiC Surface Micromachining Technology
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