A hermetic and room-temperature wafer bonding technique based on integrated reactive multilayer systems
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0960-1317/24/i=11/a=115002/pdf
Reference17 articles.
1. 3-D Hyperintegration and Packaging Technologies for Micro-Nano Systems
2. 3D integration technologies for MEMS/IC systems
3. Au-In bonding below the eutectic temperature
4. High density Cu-Sn TLP bonding for 3D integration
Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Effects of diffusion barriers on reaction wave stability in Co/Al reactive multilayers;Journal of Applied Physics;2023-11-20
2. Inductive Heating Based on VHF-ISM Radio Band Frequencies as Technology Platform for Efficient Heating of Metallic Micro-Scaled Bonding Layers in MEMS Packaging;IEEE Transactions on Magnetics;2023-11
3. Inductive heating based on VHF-ISM radio band frequencies as technology platform for efficient heating of metallic micro-scaled bonding layers in MEMS packaging;2023 IEEE International Magnetic Conference - Short Papers (INTERMAG Short Papers);2023-05
4. Localized Induction Heating of Cu-Sn Layers for Rapid Solid-Liquid Interdiffusion Bonding Based on Miniaturized Coils;Micromachines;2022-08-12
5. Low temperature bonding process of high density Cu bumps Array;2022 23rd International Conference on Electronic Packaging Technology (ICEPT);2022-08-10
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3