Fabrication of circular sawtooth gratings using focused UV lithography-Reference-Cited by-同舟云学术

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Fabrication of circular sawtooth gratings using focused UV lithography

Published:2016-01-20 Issue:3 Volume:26 Page:035001
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Mi Wujun,Karlsson Staffan,Holmberg Anders,Danielsson Mats,Nillius Peter

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/26/i=3/a=035001/pdf

Reference29 articles.

1. Fabrication of 3D nanoimprint stamps with continuous reliefs using dose-modulated electron beam lithography and thermal reflow

2. Efficient proximity effect correction method based on multivariate adaptive regression splines for grayscale e-beam lithography

3. X3D: 3D X-ray lithography and development simulation for MEMS

4. Moving mask UV lithography for three-dimensional structuring

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