Thermo-pneumatically actuated, membrane-based micro-mirror devices
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Simple models for piston-type micromirror behavior
2. A design methodology for a bulk-micromachined two-dimensional electrostatic torsion micromirror
3. Micromachined electromagnetic scanning mirrors
4. Endoscopic optical coherence tomography with new MEMS mirror
5. Tunable microfluidic microlenses
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