A micro flow sensor from a polymer for gases and liquids
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. Monolithically integrated micro flow sensor for lab-on-chip applications
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3. Micromachined flow sensors—a review
4. Thermal flow sensor for liquids and gases based on combinations of two principles
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