Level set methods for the modelling of surface evolution in the abrasive jet micromachining of features used in MEMS and microfluidic devices
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference29 articles.
1. Abrasive jet micromachining of polymethylmethacrylate
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2. Influence of Various Pulse Waveforms during Fabrication of Micro Rectangular Pattern by Masked Tool using Electrochemical Micromachining;Journal of Advanced Manufacturing Systems;2021-01-06
3. Experimental Study on Ultrasonic Assisted Electrochemical Micro-Machining of Micro-Dimple Array Structure;International Journal of Electrochemical Science;2021-01
4. Through-Mask Electrochemical Micromachining with Reciprocating Foamed Cathode;Micromachines;2020-02-11
5. An inverse method for the abrasive jet micro-machining of high aspect ratio channels of desired topography – Part I, theory;Precision Engineering;2019-07
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