Fabrication of precision 3D microstructures by use of a combination of ultraprecision diamond turning and reactive ion etching process
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. Bulk micromachining of silicon
2. Investigation of gray-scale technology for large area 3D silicon MEMS structures
3. Development of a Deep Silicon Phase Fresnel Lens Using Gray-Scale Lithography and Deep Reactive Ion Etching
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