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3D microstructuring of Pyrex glass using the electrochemical discharge machining process

  • Published:2007-04-12 Issue:5 Volume:17 Page:960-966
  • ISSN:0960-1317
  • Container-title:Journal of Micromechanics and Microengineering
  • language:
  • Short-container-title:J. Micromech. Microeng.

Author:

Zheng Zhi-Ping,Cheng Wei-Hsin,Huang Fuang-Yuan,Yan Biing-Hwa

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

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