Characterization of the mechanical behavior of SU-8 at microscale by viscoelastic analysis-Reference-Cited by-同舟云学术

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Characterization of the mechanical behavior of SU-8 at microscale by viscoelastic analysis

Published:2016-08-23 Issue:10 Volume:26 Page:105001
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Xu Tingge,Yoo Jun Hyeon,Babu Sachin,Roy Samit,Lee Jeong-Bong,Lu Hongbing

Funder

Division of Electrical, Communications and Cyber Systems

Air Force Office of Scientific Research

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/26/i=10/a=105001/pdf

Reference63 articles.

1. High-aspect-ratio resist for thick-film applications

2. Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist

3. UV-LIGA interferometer biosensor based on the SU-8 optical waveguide

4. Integrated microfluidics based on multi-layered SU-8 for mass spectrometry analysis

5. Soft, entirely photoplastic probes for scanning force microscopy

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