A novel micromachined shadow mask system with self-alignment and gap control capability
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. Shadow mask technology
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3. A silicon shadow mask for deposition on isolated areas
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5. Self-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical systems devices
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1. A thin film thermoelectric device fabricated by a self-aligned shadow mask method;Journal of Micromechanics and Microengineering;2017-03-23
2. Fabrication of Micro Annular Grooves on a Cylindrical Surface in Aluminum Alloys by Wire Electrochemical Micromachining;International Journal of Electrochemical Science;2016-08
3. Machining accuracy in pulsed wire electrochemical machining of γ-TiAl alloy;The International Journal of Advanced Manufacturing Technology;2016-01-26
4. A very-low cross-axis sensitivity piezoresistive accelerometer with an electroplated gold layer atop a thickness reduced proof mass;Sensors and Actuators A: Physical;2013-01
5. Experimental and modeling study of the capacitance–voltage characteristics of metal–insulator–semiconductor capacitor based on pentacene/parylene;Thin Solid Films;2011-04
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