RF sputtered silicon for MEMS
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference31 articles.
1. Bulk micromachining of silicon
2. Surface micromachining for microelectromechanical systems
3. Integration of sputtered silicon microstructures with pre-fabricated CMOS circuitry
4. Polycrystalline and amorphous silicon micromechanical beams: annealing and mechanical properties
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3. Review Paper: Residual Stresses in Deposited Thin-Film Material Layers for Micro- and Nano-Systems Manufacturing;Micromachines;2022-11-26
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