Author:
Adam T N,Kim S,Lv P-C,Xuan G,Ray S K,Troeger R T,Prather D,Kolodzey J
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Cited by
4 articles.
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1. Deep reactive ion etching;Handbook of Silicon Based MEMS Materials and Technologies;2020
2. Deep Reactive Ion Etching;Handbook of Silicon Based MEMS Materials and Technologies;2015
3. Surface Reactions in Microelectronics Process Technology;Annual Review of Chemical and Biomolecular Engineering;2011-07-15
4. Deep Reactive Ion Etching;Handbook of Silicon Based MEMS Materials and Technologies;2010