A silicon-on-insulator based micro check valve-Reference-Cited by-同舟云学术

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A silicon-on-insulator based micro check valve

Published:2003-12-17 Issue:3 Volume:14 Page:382-387
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Hu Min,Du Hejun,Ling Shih-Fu,Fu Yongqing,Chen Quanfang,Chow Louis,Li Bo

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. MEMS micro-valve for space applications

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