A microelectrostatic repulsive-torque rotation actuator with two-width fingers
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0960-1317/25/i=9/a=095006/pdf
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1. Theory and Experiments of Angular Vertical Comb-Drive Actuators for Scanning Micromirrors
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