Issues associated with scaling up production of a lab demonstrated MEMS mass sensor-Reference-Cited by-同舟云学术

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Issues associated with scaling up production of a lab demonstrated MEMS mass sensor

Published:2012-10-11 Issue:11 Volume:22 Page:115032
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Ortiz Pedro,Burnett Richie,Keegan Neil,Spoors Julia,Hedley John,Harris Alun,Burdess Jim,Raphoz Natacha,Collet Joël,McNeil Calum

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference42 articles.

1. Surface plasmon resonance for gas detection and biosensing

2. Piezoelectric Sorption Detector.

3. In Situ Interfacial Mass Detection with Piezoelectric Transducers

4. A Love plate biosensor utilising a polymer layer

5. Adsorption‐induced surface stress and its effects on resonance frequency of microcantilevers

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4. Diamond micro-milling of lithium niobate for sensing applications;Journal of Micromechanics and Microengineering;2016-07-01

5. A systematic approach for precision electrostatic mode tuning of a MEMS gyroscope;Journal of Micromechanics and Microengineering;2014-10-29

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